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Title:Elastomeric microsystems fabricated using transfer printing
Author(s):Yang, Zining
Director of Research:Kim, Seok
Doctoral Committee Chair(s):Kim, Seok
Doctoral Committee Member(s):Elbana, Ahmed E; Ferreira , Placid M; Vakakis, Alexander F
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):microfabrication
transfer printing
microsystems
MEMS
elastomer
vibration energy harvesting
responsive surface
tunable surface
sensors
Abstract:Transfer printing, a method to transfer microscale objects using polymeric stamps, has been studied extensively over the past decade as an enabling technology for the micro and nanofabrication of novel flexible electronics. This dissertation focuses on the adoption of transfer printing towards the fabrication of unusual elastomeric microsystems for sensing, actuation, energy harvesting and robotic micromanipulation. Conventionally, microsystems are constructed by rigid materials such as semiconductors, metals, and dielectric materials with a set of well-established processing methods such as thin film deposition, lithography, etching, chemical-mechanical planarization. Soft materials such as elastomers are in general not compatible with these semiconductor processes which involve harsh environments (high temperature, corrosive chemicals, ion radiations, etc.). In this dissertation, transfer printing is utilized such that the rigid and soft materials are prepared under their optimal conditions and integrated mechanically by transfer printing. Functional devices such as responsive surfaces and vibration energy harvesters are constructed to demonstrate the benefits of the unconventional elastomeric microsystem. Such devices outperform rigid systems regarding large deformation capability and providing additional design and functionalities that are not possible with rigid components alone. As the first example, responsive surfaces with hybrid elastomer-silicon microstructure is fabricated using transfer printing. The elastomer-silicon hybrid microstructure can be actuated using external mechanical, electrical, or magnetic stimuli to realize tunable functions including tunable topography, wettability, optical transmission, structural coloration, etc. As the second example, elastomeric microsystems with tunable and broadband resonators are constructed for broadband vibration energy harvesting and self-powered motion sensing. In addition to the demonstration of functional elastomeric microstructures and devices, this thesis also contributes to the fundamental study of transfer printing process including the positioning error during transfer printing, the joining strength of material pairs after thermal processing, and thermal stress and deformation due to thermal processing.
Issue Date:2018-07-10
Type:Thesis
URI:http://hdl.handle.net/2142/101783
Rights Information:Copyright 2018 Zining Yang
Date Available in IDEALS:2018-09-27
Date Deposited:2018-08


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