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Title:A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications
Author(s):Nan, Kewang
Director of Research:Rogers, John A; Braun, Paul V
Doctoral Committee Chair(s):Kim, Seok
Doctoral Committee Member(s):Li, Xiuling
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):mechanically-guided 3D assembly
micro fabrications
flexible and stretchable electronics
Abstract:Controlled formation of three-dimensional functional mesostructures (3DFMs) has broad engineering implications in biomedical devices, microelectromechanical systems (MEMS), optics, and energy storage. Most existing 3D techniques, however, not only lack compatibility with essential electronic materials (silicon, metals, ceramics) that exist in solid-state or crystalline forms, but also produce in a slow and inefficient manner. This is in stark contrast to the planar technologies widely adopted by the modern semiconductor industry. I propose to solve these challenges by a novel 3D assembly strategy based on the planar technologies, which involves precisely controlled 2D-to-3D transformations via the substrate-induced mechanical buckling. This lithography-based, mechanically-guided 3D approach is compatible with virtually any engineering thin films including semiconductors, metals, and polymers, applies to a wide range of length scales and geometries and produces in a high throughput. In this dissertation, I present strategies that combine fabrications and mechanics to achieve a set of complex 3D geometries. I also study the potentials of the 3DFMs in micro-robotics. I further demonstrate the unique applications in energy harvesting, bio-integrated systems, and nanoscale sensing. The results may enlighten the development of advanced, multi-functional 3D electronic micro-systems inaccessible to other 3D techniques.
Issue Date:2018-11-30
Type:Thesis
URI:http://hdl.handle.net/2142/102450
Rights Information:Copyright 2018 Kewang Nan
Date Available in IDEALS:2019-02-06
Date Deposited:2018-12


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