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Title:Diffusion and Electrical Properties of Sulfur Implanted in Gallium Arsenide
Author(s):Chan, Siu Sing
Subject(s):Semicoductors
Dual implantations
Donors
Sulfur doping
Impurity interactions
Defects
Issue Date:1983-07
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG 83-2213, R-992
Type:Text
Language:English
URI:http://hdl.handle.net/2142/103652
Sponsor:Joint Services Electronics Program; Office of Naval Research / N00014-79-C-0424; N00014-76-C-0806
Date Available in IDEALS:2019-05-02


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