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Title:Long-term conductively coupled silicon bioelectronics encapsulation using P++ nanomembranes
Author(s):Zhong, Yishan
Contributor(s):Rogers, John A.
Subject(s):bioelectronics
encapsulation
flexible electronics
biomedical implant
silicon electronics
Abstract:Chronic and long-term stable silicon bioelectronics open the possibility for direct integration of biological systems and devices that can be fabricated using conventional semiconductor foundries. We propose a novel encapsulation method that consists of a highly doped p++ nanomembrane and a thermally grown silicon dioxide layer. The structure formed is both a reliable biofluidic barrier and a conductively sensing interface. A soak test in high temperature highlights the structure’s effective elongation on the lifetime of the electronics.
Issue Date:2019-05
Genre:Other
Type:Text
Language:English
URI:http://hdl.handle.net/2142/104055
Date Available in IDEALS:2019-06-19


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