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Title:A VELOCITY MAP IMAGING ANALYSIS OF Fe(CO)5, W(CO)6 AND ELECTRON STIMULATED DESORPTION IN Me2Au(acac)
Author(s):Pintea, Maria
Contributor(s):Amiaud, Lionel ; Mason, Nigel
Subject(s):Mini-symposium: High-Harmonic Generation and XUV Spectroscopy
Abstract:Tungsten hexacarbonyl and iron pentacarbonyl are two of the common precursors used for Focused Electron Beam Induced Deposition (FEBID). FEBIP is one of the new techniques explored by the nanotechnology industry to build sub-10nm structures. Velocity Map Imaging (VMI) technique has been used in the study of the Fe(CO)5 and W(CO)6 compounds to refining Malli L. Gulzari et al. [3], Rosenberg G. et al. [4] the electron beam induced deposition process by giving the essential details on this molecules, such as cross sections, kinetic energies, angular distributions. Neustetter M. et al. [5], Thon R. et al. [6] A molecular analysis of surfaces and deposition of Me2Au(acac) has been performed using electron stimulated desorption (ESD) and temperature programmed desorption (TPD) revealing the presence of C2H2, AuII, CO, O+. A plain Copper substrate has been used for deposition of the compound at a pressure of ~10-8 mbar for 2 min, equivalent to 3.4L. This work is part of the ELENA Horizon 2020 Training Network, www.elena-eu.org was developed as a European Initiative to support the emerging nanotechnology market and as a response to the increasing demand in this field.
Issue Date:2019-06-20
Publisher:International Symposium on Molecular Spectroscopy
Genre:Conference Paper / Presentation
Type:Text
Language:English
URI:http://hdl.handle.net/2142/104270
DOI:10.15278/isms.2019.RK04
Rights Information:Copyright 2019 Maria Pintea
Date Available in IDEALS:2019-07-15
2020-01-25


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