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Title:Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM
Author(s):Chen, Sihan
Advisor(s):King, William P.
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):contact stiffness
AFM
calibration
Abstract:This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.
Issue Date:2015-07-20
Type:Text
URI:http://hdl.handle.net/2142/105279
Rights Information:Copyright 2015 by Sihan Chen. All rights reserved.
Date Available in IDEALS:2019-08-23
Date Deposited:2015-08


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