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Title:Application of controlled spalling to thin-film lithium niobate transducers
Author(s):Rich, Dennis
Contributor(s):Bayram, Can
Subject(s):Controlled spalling
Thin film
Sensors
Abstract:The phenomenon of spalling, the peeling of films from substrates based on stress, is investigated for use in production of thin films. Software is developed to understand this process and develop predictions for controlling it. A specific implementation of the controlled spalling method is developed, using electroplating to deposit a stressed film with tunable properties. An original sample holder is developed for efficient performance of this process, and analysis of deposition through scanning electron microscopy profilometry and Nomarski microscopy is used to make it repeatable. Stresses are measured through optical profilometry and determined to be too low; conclusions are drawn about future steps necessary to reach the stresses needed for controlled spalling. Steps are also taken to measure the fracture toughness of lithium niobite through nanoindentation. This measurement, not yet made in the literature, makes possible the analysis of controlled spalling of lithium niobite for application to thin-film transducers useful to stress sensing and communications in restrictive form-factor settings such as outer space or the human body.
Issue Date:2018-12
Genre:Other
Type:Text
Language:English
URI:http://hdl.handle.net/2142/105411
Sponsor:Air Force Office of Scientific Research Young Investicator Program, number FA9550-16-1-0224
Date Available in IDEALS:2019-09-04


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