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Title:ESD circuit design and measurement techniques
Author(s):Ayling, Alex Eben
Advisor(s):Rosenbaum, Elyse
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Electrostatic Discharge, Integrated Circuits
Abstract:Part 1 of this thesis presents a method to measure sub-nanosecond reverse recovery in wafer-level test structures. The setup uses a transmission line pulse generator with a time domain through connection to measure the device under test current. The setup is then used to measure reverse recovery in a 65 nm CMOS ESD diode, and it is found that a quasi-static compact model does not accurately describe the observed transient. A non-quasi-static charge control model is used to accurately simulate both the reverse recovery and forward bias behavior. Part 2 of this thesis reports the design and fabrication of an active feedback based high-voltage tolerant power clamp with optimally biased positive and negative feedback to bypass the trade-off between ESD performance and mis-trigger immunity. The circuit was fabricated in 28 nm CMOS, and characterization results show a 70% improvement in failure current over previous designs while maintaining mis-trigger immunity.
Issue Date:2020-05-12
Type:Thesis
URI:http://hdl.handle.net/2142/108033
Rights Information:Copyright 2020 Alex Ayling
Date Available in IDEALS:2020-08-26
Date Deposited:2020-05


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