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Title:Design, fabrication, and characterization of a lithium niobate optomechanical photodetector based on released whispering-gallery-mode microdisk resonators
Author(s):Meygoo Lavasani, Ali
Advisor(s):Gong, Songbin
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Lithium Niobate, Whispering-Gallery-Mode (WGM) Micro-disk Optical Resonators, RF MEMS Acoustic Resonators, Optomechanical Photodetector.
Abstract:Lithium Niobate (LiNbO3) is a piezoelectric material that also exhibits promising optical characteristics such as low optical loss and high electro-optic coefficient, making it an interesting choice for Radio Frequency (RF) micro-opto-electro-mechanical systems (MOEMS) and devices, electro-optical modulators and tunable filters, and other high-speed and low-loss photonic devices. In this work, an opto-electro-mechanical device for detecting light power is developed on a Lithium Niobate platform using a combination of Whispering-Gallery-Mode (WGM) micro-disk optical resonators and suspended RF MEMS acoustic resonators. The fundamental idea behind this device is changing the device’s measured impedance by shifting the resonance frequency of the acoustic resonator, which is performed by an increase in the temperature of the device caused by the input light. The theory, design, simulation, fabrication process, as well as the measured response of the device are presented. The device manifests a responsivity of up to 123 Ω/mW or %3.44/mW at its 3.5 GHz fundamental mode. Lastly, the results are analyzed, and potential ideas for future research based on this work are proposed.
Issue Date:2021-04-16
Type:Thesis
URI:http://hdl.handle.net/2142/110486
Rights Information:Copyright 2021 Ali Lavasani
Date Available in IDEALS:2021-09-17
Date Deposited:2021-05


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