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Title:Effect of native AL2O3 on the elastic response of nanoscale aluminum films
Author(s):Saif,M. Taher A.; Zhang, Sulin; Haque, Amanul; Hsia, K. Jimmy
Subject(s):Aluminum Films
Nanoscale Aluminum Films
Elastic Response
Mems Techniques
Abstract:A continuous, dense aluminum oxide (Al2O3) layer of about 5 nm forms on the surface of Al alloys upon exposure to oxygen or dry air, thus preventing further oxidation of the alloy. Since the elastic moduli of Al and Al2O3 are 69 GPa and 370 GPa, respectively, the elastic modulus of a thin Al film of sub-micron dimension (with the native oxide layer) should be much higher than that of pure Al. However, uniaxial tensile measurements on Al films with thickness down to 50 nm revealed an effective modulus close to 69 GPa. ln the present paper, we investigate a plausible mechanism for this discrepancy, namely, the effect of wavy surface oxide layer. Here thin Al films are considered as AI- Al2O3 composites. Uniaxial tensile experiments on a freestanding, 200 nm thick Al film are performed using MEMS techniques. The surface morphology of the specimen is characterized by AFM. An analytical model is developed to estimate the effective modulus, Ē , of a wavy oxide layer. The current study shows that the model predictions using measured material parameters agree reasonably well with the experimental results, thus supporting the validity of the proposed mechanism.
Issue Date:2002-01
Publisher:Department of Theoretical and Applied Mechanics. College of Engineering. University of Illinois at Urbana-Champaign
Series/Report:TAM R 995
2002-6003
Genre:Technical Report
Type:Text
Language:English
URI:http://hdl.handle.net/2142/112687
ISSN:0073-5264
Rights Information:Copyright 2002 Board of Trustees of the University of Illinois
Date Available in IDEALS:2021-11-04


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  • Technical Reports - Theoretical and Applied Mechanics (TAM)
    TAM technical reports include manuscripts intended for publication, theses judged to have general interest, notes prepared for short courses, symposia compiled from outstanding undergraduate projects, and reports prepared for research-sponsoring agencies.

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