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Title:Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers
Author(s):Corbin, Elise A.
Advisor(s):King, William P.
Contributor(s):King, William P.
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Atomic Force Microscopy (AFM)
cantilever
Heated microcantilevers
Temperature
Sensitivity
Resolution
Raman
Spectroscopy
Abstract:This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.
Issue Date:2010-01-06
URI:http://hdl.handle.net/2142/14618
Rights Information:Copyright 2009 Elise A. Corbin
Date Available in IDEALS:2010-01-06
Date Deposited:December 2


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