Files in this item

FilesDescriptionFormat

application/pdf

application/pdf2_Kwon_Beomjin.pdf (717kB)
(no description provided)PDF

Description

Title:Thermomechanical sensitivity of microcantilever in the mid-infrared spectral region
Author(s):Kwon, Beomjin
Advisor(s):King, William P.
Contributor(s):King, William P.
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Bimaterial
Microcantilevers
infrared
thermomechanical
photothermal
FT-IR microscopy
monochromator
modeling
Abstract:This paper reports the thermomechanical sensitivity of bimaterial cantilevers over a mid-infrared (IR) spectral range (5-10 µm) that is critical both for chemical analysis via vibrational spectroscopy and for direct thermal detection in the 300-700 K range. Mechanical bending sensitivity and noise were measured and modeled for six commercially available microcantilevers, which consist of either an aluminum film on a silicon cantilever or a gold film on a silicon nitride cantilever. The spectral sensitivity of each cantilever was determined by recording cantilever deflection when illuminated with IR light from a monochromator. Rigorous modeling and systematic characterization of the optical system allowed for a quantitative estimate of IR energy incident upon the cantilever. Separately, spectral absorptance of the cantilever was measured using Fourier transform infrared (FT-IR) microscopy, which was compared with analytical models of radiation onto the cantilever and heat flow within the cantilever. The predictions of microcantilever thermomechanical bending sensitivity and noise agree well with measurements, resulting in a ranking of these cantilevers for their potential use in IR measurements.
Issue Date:2010-01-06
URI:http://hdl.handle.net/2142/14659
Rights Information:Copyright 2009 Beomjin Kwon
Date Available in IDEALS:2010-01-06
Date Deposited:December 2


This item appears in the following Collection(s)

Item Statistics