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Title:Fluidic characterization of electric field sensitivity of Ti-GaAs Schottky junction gated field-effect biosensors
Author(s):Suk, Ho-Jun
Advisor(s):Bashir, Rashid
Contributor(s):Bashir, Rashid
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Metal semiconductor hybrid
biosensor
electric field sensing
Schottky junction
Abstract:This thesis reports the electric field sensitivity of fluid gated metalsemiconductor hybrid (MSH) Schottky structures consisting of a Titanium layer on ntype GaAs. Compared to standard field-effect sensors, the MSH Schottky structures show 21 times larger resistance change with electric field at -46.6 V/cm. The fluidic gate voltages are mirrored by the metal shunt, resulting in larger depletion widths under the Schottky junction and resistance change as compared to devices with no Schottky junction. Two-dimensional numerical simulation results are in good agreement with the measured data, and a thinner mesa with lower doping density can further increase sensor sensitivity. These metal-semiconductor hybrid (MSH) Schottky sensors are thus very promising for label-free biosensing.
Issue Date:2010-01-06
URI:http://hdl.handle.net/2142/14677
Rights Information:Copyright 2009 Ho-Jun Suk
Date Available in IDEALS:2010-01-06
Date Deposited:December 2


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