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Browse Dissertations and Theses - Aerospace Engineering by Author "Yagnamurthy, Naga Sivakumar"
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Effect of grain structure and doping on the mechanical properties of polysilicon thin films for MEMS (2014-01-16)Freestanding devices fabricated for Microelectromechanical Systems (MEMS) employ slender polysilicon flexures that are prone to failure due to large operating stresses. Polycrystalline silicon (polysilicon) films with ...
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