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Title:Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments
Author(s):Kim, Taek-Lim
Advisor(s):Eden, James G.
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):Microplasma
Silicon microplasma device
microlaser
microjet
Abstract:Novel microcavity and microchannel plasma devices in Si have provided new and efficient sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation. The realization of this new platform for devices is implemented through VLSI and MEMS fabrication techniques. In this thesis, the basic physics of plasma discharges is presented, and the performance of Si microplasma devices with inverted pyramidal cavity and V-grooved channel configurations is described in some detail.
Issue Date:2010-05-18
URI:http://hdl.handle.net/2142/15971
Rights Information:Copyright 2010 Taek-Lim Kim
Date Available in IDEALS:2010-05-18
2012-05-19
Date Deposited:May 2010


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