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Title: Characterization of a molded plastic array of ten microplasma jet devices
Author(s): Ma, Jeffrey H.
Advisor(s): Eden, J. Gary
Department / Program: Electrical & Computer Eng
Discipline: Electrical & Computer Engr
Degree Granting Institution: University of Illinois at Urbana-Champaign
Degree: M.S.
Genre: Thesis
Subject(s): microplasma jet
He microplasma
Abstract: Novel microplasma jet devices can be fabricated in plastic substrates using inexpensive tools and materials. A simple molding process used for creating microplasma channels has been developed at the Laboratory for Optical Physics and Engineering. These devices have provided the opportunity to investigate characteristics and potential applications of arrays of microplasma jets. In this thesis, the basic plasma physics in addition to the necessary fabrication and experimental techniques are discussed. Finally, the operating characteristics of a particular type of microplasma jet array are discussed. The results presented have opened the door to realizing large arrays of low-temperature plasma expansions.
Issue Date: 2011-01-21
Rights Information: Copyright 2010 Jeffrey H. Ma
Date Available in IDEALS: 2011-01-21
Date Deposited: 2010-12

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