Browse College of Engineering by Author "Ouyang, Zihao"
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Ouyang, Zihao (2014-01-16)Two approaches of through-silicon-via (TSV) etching methods, the Bosch process (alternating etching/passivation phases) and the single-step etching, have been experimentally investigated and theoretically modeled in this ...
Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure Ouyang, Zihao (2011-05-25)This thesis details the design and construction of a microwave generation system, and a coaxial cylindrical plasma torch, where an atmospheric-pressure plasma (APP) can be generated using 2.45 GHz. The discharge characteristics ...