Browse College of Engineering by Contributor "Abelson, John Robert"
Now showing items 1-2 of 2
Control of Thin-Film Silicon Microstructure With Low-Energy Particle Bombardment in Reactive Sputtering (2001)Hydrogen can be added to the growth chamber to promote a phase change to nanocrystalline silicon at moderate growth temperatures. The growth flux with hydrogen includes energetic (∼100eV) neutral H, produced by the ...
Low-Temperature Silicon Thin Films for Large-Area Electronics: Device Fabrication Using Soft Lithography and Laser-Crystallization by Sequential Lateral Solidification (2001)We have analyzed the electrical properties of SLS poly-Si films on oxidized Si wafer using the pseudo-MOSFET geometry; the majority carrier mobility is extracted from the transconductance. However, the data are non-ideal ...