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Title:High precision electrohydrodynamic printing of polymer onto microcantilever sensors
Author(s):Pikul, James H.
Advisor(s):King, William P.
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Polymer Deposition
Polymer Printing
Microelectromechanical Systems
Mass Sensing
Abstract:This thesis reports electrohydrodynamic jet printing to deposit 2 – 27 um diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50 - 4130 Hz corresponded to a polymer mass of 4.5 - 135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.
Issue Date:2011-05-25
Rights Information:Copyright 2011 James Pikul
Date Available in IDEALS:2011-05-25
Date Deposited:2011-05

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