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Title:Position and velocity sensing measurements using an integrated VCSEL and pin photodetector assembly
Author(s):Jefvert, Thomas M.
Advisor(s):Choquette, Kent D.
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):vertical-cavity surface-emitting laser (VCSEL)
p-type/intrinsic/n-type (PIN) photodetector
position
velocity
integrated
sensing
Abstract:A position sensing optical microsystem that is low-power, non-contact and long-range was characterized. A vertical-cavity surface-emitting laser monolithically integrated with a photodetector packaged in a low profile assembly was used in conjunction with a metallic optical grating. By observing the modulated reflection of laser light off the grating collected by the detector, we can determine the speed and/or the relative position of the grating. The capability of the assembly as a sensor was investigated using a motorized stage and an air gantry motion system. On the air gantry system, the position sensing assembly measured the distance traveled to within 0.875 microns and the velocity to within 3% of the speed measured by conventional means. With the linear actuator, due to the discrete steps of operation, the measured distance was within 3.5 microns and the velocity to within 60%.
Issue Date:2011-05-25
URI:http://hdl.handle.net/2142/24383
Rights Information:Copyright 2011 Thomas M. Jefvert
Date Available in IDEALS:2011-05-25
2013-05-26
Date Deposited:2011-05


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