Files in this item
Files | Description | Format |
---|---|---|
application/pdf ![]() | (no description provided) |
Description
Title: | Advanced control of MEMS probing devices |
Author(s): | Zhang, Xuemeng |
Advisor(s): | Salapaka, Srinivasa M. |
Department / Program: | Mechanical Sci & Engineering |
Discipline: | Mechanical Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | M.S. |
Genre: | Thesis |
Subject(s): | micro-electro-mechanical systems (MEMS)
electrostatic comb drive nanopositioning system identification H∞ control. |
Abstract: | This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design. |
Issue Date: | 2011-08-25 |
URI: | http://hdl.handle.net/2142/26151 |
Rights Information: | Copyright 2011 by Xuemeng Zhang. All rights reserved. |
Date Available in IDEALS: | 2011-08-25 |
Date Deposited: | 2011-08 |
This item appears in the following Collection(s)
-
Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois -
Dissertations and Theses - Mechanical Science and Engineering