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Title:Advanced control of MEMS probing devices
Author(s):Zhang, Xuemeng
Advisor(s):Salapaka, Srinivasa M.
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):micro-electro-mechanical systems (MEMS)
electrostatic comb drive
nanopositioning
system identification
H∞ control.
Abstract:This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design.
Issue Date:2011-08-25
URI:http://hdl.handle.net/2142/26151
Rights Information:Copyright 2011 by Xuemeng Zhang. All rights reserved.
Date Available in IDEALS:2011-08-25
Date Deposited:2011-08


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