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Title:Strain sensor array using printed single crystalline silicon on plastic substrate
Author(s):Won, Sang M.
Advisor(s):Rogers, John A.
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):strain sensor
flexible electronic
radio frequency
Abstract:This thesis analyzes the piezoresistive effect in metal and semiconductor, discusses the effect of temperature and doping concentration, introduces a newly developed strain gauge using single crystalline silicon on plastic substrate, and describes the Colpitts oscillator that has the potential of wireless data transmission between sensor and data acquisition unit. In general, a metal strain gauge has high flexibility with low sensitivity, whereas the semiconductor strain gauge has high sensitivity with low flexibility. Devices using thin ribbons of single crystalline silicon on plastic show gauge factor of 41 with good flexibility and repeatability. Integrating with PN diodes on the same substrate yields a large area 6 x 6 array that can be used in various applications such as structural health monitoring and cybergloves. The successful fabrication of all active and passive components of the Colpitts oscillator on the same flexible substrate has great promise for future high speed wireless data acquisition systems.
Issue Date:2011-08-26
Rights Information:Copyright 2011 Sang M. Won
Date Available in IDEALS:2013-08-27
Date Deposited:2011-08

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