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Title:Modeling and measurements of an ionized physical vapor deposition device plasma
Author(s):Juliano, Daniel Rene
Director of Research:Ruzic, David N.
Doctoral Committee Chair(s):Ruzic, David N.
Doctoral Committee Member(s):Sullivan, Jeremiah D.; Lamb, F.K.; Van Harlingen, Dale J.
Department / Program:Physics
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:PhD
Genre:Dissertation
Type:Thesis
Date Available in IDEALS:2012-05-29


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