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Title:Residual stress effects on piezoelectric response of sol-gel derived PZT thin films
Author(s):Berfield, Thomas A.; Ong, Ryan J.; Payne, David A.; Sottos, Nancy R.
Abstract:Piezoelectric properties of three sol-gel derived Pb(Zr0.53Ti0.47)O3 thin film samples integrated on to Pt/Ti/SiO 2//Si substrates are investigated to delineate the influence of residual stress on the strain-field response from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for identical films ranging in thickness from 190nm to 500nm. Field-induced strains are measured interferometically for each film under either a large AC driving voltage or a small AC ripple applied over a range of DC biases. Higher residual stresses decrease measured piezoelectric response, while thickness variations with no accompanying change in residual stress state produce little change in strain-field behavior. The diminished performance associated with high residual stresses is attributed to reductions in both linear and nonlinear contributions, including decreased polarization switching and domain motion.
Issue Date:2005-04
Publisher:Department of Theoretical and Applied Mechanics (UIUC)
Citation Info:Published as: Thomas A. Berfield, Ryan J. Ong, David A. Payne, Nancy R. Sottos. Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films. Journal of Applied Physics, Vol. 101, 2007, pp 024102 (7 pages). DOI: 10.1063/1.2422778. Available at: or Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Series/Report:TAM Reports 1062, (2005)
Genre:Technical Report
Publication Status:published or submitted for publication
Peer Reviewed:is peer reviewed
Date Available in IDEALS:2007-03-09

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  • Technical Reports - Theoretical and Applied Mechanics (TAM)
    TAM technical reports include manuscripts intended for publication, theses judged to have general interest, notes prepared for short courses, symposia compiled from outstanding undergraduate projects, and reports prepared for research-sponsoring agencies.

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