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Title:Development of GaN-based power electronic devices using plasma-assisted molecular beam epitaxy
Author(s):Hong, Seung Jae
Department / Program:Electrical and Computer Engineering
Discipline:Electrical and Computer Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Electronics and Electrical.
Engineering, Materials Science.
Issue Date:2006
Type:Text
Language:English
Description:Source: Dissertation Abstracts International, Volume: 67-11, Section: B, page: 6611.
Adviser: Kyekyoon (Kevin) Kim.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.
Includes bibliographical references (leaves 106-117)
School code: 0090.
This thesis work presents a comprehensive study on the development of GaN-based power electronic devices. The hands-on research on GaN compound semiconductors includes thin film growth, material characterization, device fabrication, and device characterization using state-of-the-art semiconductor processing equipment and characterizing tools. High-quality GaN films grown by plasma-assisted molecular beam epitaxy (PAMBE) are used for the fabrication of GaN-based field-effect transistor (FET) devices such as metal semiconductor FET (MESFET) and high electron mobility transistor (HEMT). In order to investigate the GaN-based FETs, theoretical principles, processing conditions, and characterization skills of the ohmic and Schottky metal contacts are discussed. The present work especially focuses on the reduction of power losses in GaN-based FET devices. For the first time, the PAMBE-based selective-area growth (SAG) technique is demonstrated to improve the properties of the ohmic contacts for n-GaN and AlGaN. Employing this technique, high-performance GaN MESFETs and HEMTs are fabricated and characterized.
URI:http://hdl.handle.net/2142/34951
ISBN:9780542988691
0542988690
Rights Information:Copyright 2006 Hong, Seung Jae, 1975-
Date Available in IDEALS:2012-11-02
Date Deposited:2006
Has Version(s):http://www.library.uiuc.edu/proxy/go.php?url=http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:3242872
Identifier in Online Catalog:5385115
OCLC Identifier:(OCoLC)ocn166289918


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