Files in this item
| Files | Description | Format |
|---|---|---|
|
application/pdf  Schmucker_FDSS_AuthorsFinalVersion.pdf (2MB) | Authors Copy of Manuscript |
Description
| Title: | Field-Directed Sputter Sharpening for Tailored Probe Materials and Atomic-Scale Lithography |
| Author(s): | Schmucker, Scott W.; Kumar, Navneet; Abelson, John R.; Daly, Scott R.; Girolami, Gregory S.; Bischof, Maia R.; Jaeger, David L.; Reidy, Rick F.; Gorman, Brian P.; Alexander, Justin; Ballard, Josh B.; Randall, John N.; Lyding, Joseph W. |
| Subject(s): | scanning tunneling microscopy
sputtering Sputter Sharpening, Plasma, Field Emitters field-directed sputter sharpening |
| Abstract: | Fabrication of ultra-sharp probes is of interest for many applications, including scanned probe microscopy and electron-stimulated patterning of surfaces. These techniques require reproducible ultra-sharp metallic tips, yet the efficient and reproducible fabrication of these consumable items has remained an elusive goal. We describe a novel biased-probe field-directed sputter sharpening technique, applicable to conductive materials, which produces nanometer and sub-nanometer sharp W, Pt-Ir, and W-HfB2 tips able to perform atomic-scale lithography on Si. Compared with traditional probes fabricated by etching or conventional sputter erosion, field-directed sputter sharpened probes have smaller radii and produce lithographic patterns 18 – 26% sharper with atomic-scale lithographic fidelity. |
| Issue Date: | 2012-07-03 |
| Publisher: | Nature Publishing Group |
| Citation Info: | Nat Commun. 2012 Jul 3;3:935. |
| Genre: | Article |
| Type: | Text |
| Language: | English |
| URI: | http://hdl.handle.net/2142/41285 |
| DOI: | https://doi.org/10.1038/ncomms1907 |
| Publication Status: | published or submitted for publication |
| Peer Reviewed: | is peer reviewed |
| Sponsor: | Office of Naval Research Grant N00014-06-10120 Defense Advanced Research Project Agency and Space and Naval Warfare Center, San Diego contract N66001-08-C-2040 National Science Foundation grant CHE 10-38015 National Science Foundation grant DMR 10-05715 National Science Foundation grant CHE 07-50422 |
| Date Available in IDEALS: | 2013-02-01 |
This item appears in the following Collection(s)
-
Illinois Research and Scholarship (Open Community)
This is the default collection for all research and scholarship developed by faculty, staff, or students at the University of Illinois at Urbana-Champaign