Files in this item
Files | Description | Format |
---|---|---|
application/pdf ![]() | Authors Copy of Manuscript |
Description
Title: | Field-Directed Sputter Sharpening for Tailored Probe Materials and Atomic-Scale Lithography |
Author(s): | Schmucker, Scott W.; Kumar, Navneet; Abelson, John R.; Daly, Scott R.; Girolami, Gregory S.; Bischof, Maia R.; Jaeger, David L.; Reidy, Rick F.; Gorman, Brian P.; Alexander, Justin; Ballard, Josh B.; Randall, John N.; Lyding, Joseph W. |
Subject(s): | scanning tunneling microscopy
sputtering Sputter Sharpening, Plasma, Field Emitters field-directed sputter sharpening |
Abstract: | Fabrication of ultra-sharp probes is of interest for many applications, including scanned probe microscopy and electron-stimulated patterning of surfaces. These techniques require reproducible ultra-sharp metallic tips, yet the efficient and reproducible fabrication of these consumable items has remained an elusive goal. We describe a novel biased-probe field-directed sputter sharpening technique, applicable to conductive materials, which produces nanometer and sub-nanometer sharp W, Pt-Ir, and W-HfB2 tips able to perform atomic-scale lithography on Si. Compared with traditional probes fabricated by etching or conventional sputter erosion, field-directed sputter sharpened probes have smaller radii and produce lithographic patterns 18 – 26% sharper with atomic-scale lithographic fidelity. |
Issue Date: | 2012-07-03 |
Publisher: | Nature Publishing Group |
Citation Info: | Nat Commun. 2012 Jul 3;3:935. |
Genre: | Article |
Type: | Text |
Language: | English |
URI: | http://hdl.handle.net/2142/41285 |
DOI: | https://doi.org/10.1038/ncomms1907 |
Publication Status: | published or submitted for publication |
Peer Reviewed: | is peer reviewed |
Sponsor: | Office of Naval Research Grant N00014-06-10120 Defense Advanced Research Project Agency and Space and Naval Warfare Center, San Diego contract N66001-08-C-2040 National Science Foundation grant CHE 10-38015 National Science Foundation grant DMR 10-05715 National Science Foundation grant CHE 07-50422 |
Date Available in IDEALS: | 2013-02-01 |
This item appears in the following Collection(s)
-
Illinois Research and Scholarship (Open Community)
This is the default collection for all research and scholarship developed by faculty, staff, or students at the University of Illinois at Urbana-Champaign