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Title:Novel Sterilization Technique Using Microplasma Jets With Large Arrays Of Microchannels
Author(s):Kim, Annie Jeesoo
Contributor(s):Park, Sung-Jin
Subject(s):plasma devices
microplasma devices
plasma jets
microchannel arrays
biomedical devices
Abstract:Microplasmas are micro-scale plasmas, or non-equilibrium discharges that are generated from electrically excited gas atoms or molecules at around atmospheric pressures or above. With 20 kHz of sinusoidal waveform voltage driving as the excitation source and He feedstock gas pressure at 840 ± 20 Torr, the electric field is formed between the electrodes maximizing the effective path length of the electrons. This enables electrons to undergo ionizing collisions with the gas molecules generating ionized discharges. Fabrication of the microplasma devices involves embedding copper wires parallel to the axes of the microchannels which serve as electrodes in molded, flexible, and transparent polymer. This thesis consists of experiments with an array of microplasma devices as large as 5 x 5 configuration that generate uniform 355 μm diameter microplasma jets up to 3.8 ± 0.2 mm in length operating with He gas at 840 ± 20 Torr. These microplasma jets penetrate ambient air creating a path for active radical species such as ozone, OH radicals, and N2+ molecules that enable sterilization. Large arrays of microchannel in microplasma devices provide an alternative solution of sterilization and disinfection techniques suitable for a variety of fields such as biomedical and industrial applications.
Issue Date:2012-12
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-09

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