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Title:Fabrication of Nano-Porous Anodic Aluminum Oxide for Nanotechnology Applications
Author(s):Rajarajan, Sundaravadivel
Contributor(s):Lyding, Joseph W.
anodic aluminum oxide
Abstract:In this thesis, I will present a templated self-assembly technique to fabricate regularly ordered nano-pores. This pore fabrication technique provides a highly cost efficient alternative to other significantly more expensive and slow top-down patterning techniques such as e-beam lithography. An electrochemical anodization step is the core process in this technique for growing a porous oxide layer. During anodization of aluminum in an acid electrolyte, a competing oxidation and oxide dissolution process leads to self-assembly of pores on the grown oxide film. Since pore nucleation occurs at random surface fluctuations and defect sites, pure self-assembly only gives short range ordering of pores. In this method, in order to promote long-range ordering, the aluminum layer is pre-patterned with a two-step nanoimprint to assist pore nucleation at regular, predetermined sites. The five-step fabrication process, involving electro polishing, nano-imprint, first anodization, oxide etch and second anodization, will be further illustrated in this work. A PMMA based transfer process that allows the transfer of the porous oxide film from its aluminum substrate to a more suitable substrate will also be presented in detail. Post-transfer, these porous oxide films can be used either as a deposition mask or an evaporation mask for myriad nanotechnology applications. To conclude this work, a few possible applications of these nano-porous anodic oxide films will be proposed to motivate future research in this area.
Issue Date:2012-12
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-09

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