Files in this item

FilesDescriptionFormat

application/pdf

application/pdfECE499-Sp2009-hardy.pdf (7MB)Restricted to U of Illinois
(no description provided)PDF

Description

Title:Calibration of an Integrated VCSEL/PIN Device for Position Sensing
Author(s):Hardy, Nicholas D.
Contributor(s):Choquette, Kent
Subject(s):lasers
semiconductor lasers
vertical-cavity surface-emitting lasers
photodetectors
sensing
position sensing
PIN photodetectors
Abstract:Compact, non-contact, and low operating power sensors are desirable for a number of applications. Mono- lithically integrated vertical-cavity surface-emitting lasers (VCSELs) and PIN photodetectors have been designed and fabricated for optical position sensing. Using a metallic grating as a position gauge, the sensors measure differences in reflected power from the grating as it travels parallel to the sensors. This measurement technique allows for a high spatial resolution. Calculations indicate that such a device can detect spatial changes on the order of the wavelength of light emitted from the laser. Measurements from the work described here show the potential to use VCSEL/PIN chips to determine position with an accuracy of sub-micron resolution.
Issue Date:2009-05
Genre:Other
Type:Text
Language:English
URI:http://hdl.handle.net/2142/47027
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-22


This item appears in the following Collection(s)

Item Statistics