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Title:Performance of a Ferroelectric Microcavity Plasma Device
Author(s):Houlahan, Thomas
Contributor(s):Eden, J. Gary; Park, Sung-Jin
Subject(s):plasma devices
microcavity plasmas
ferroelectric substrate
Abstract:The creation of non-equilibrium plasmas in cavities with a micron-scale characteristic dimension has been heavily studied in the past decade. Generating plasma in such small cavities allows for near-atmospheric operating pressures and very high power-loading. The operating characteristics of a microcavity plasma array are dependent upon many factors, including the choice of a substrate material, within which the plasma is excited and contained. This paper introduces a new substrate material, Pb[ZxTi1-x]O3 (PZT) on the basis that its ferroelectric properties will enhance the field applied to the cavities and lead to low turn-on voltages for the microcavity plasma arrays.
Issue Date:2009-05
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-22

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