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Title:Printed Integrated Circuits and Strain Sensor Array on Plastic Substrate for Structural Health Monitoring System
Author(s):Kim, Young Hwa
Contributor(s):Rogers, John A.; Kim, Hoonsik
Subject(s):flexible electronics
strain sensors
thin-film transistors
health monitoring
Abstract:In this thesis, we present a single crystalline silicon-based flexible strain sensor with integrated multiplexing thin-film transistors (TFTs). In this system, thin (260 nm) single crystalline silicon membranes are transferred from the donor substrate and printed onto a polyimide substrate using a polydimethylsiloxane (PDMS) stamp, and both strain sensor cells and TFTs are fabricated on the printed silicon membrane. Due to high piezoresistive coefficients of single crystalline silicon, our strain sensor cell exhibits gauge factors that are orders of magnitude higher than those of conventional metal foil strain sensor making it suitable for numerous applications such as a large-area structural health monitor.
Issue Date:2009-05
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-23

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