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Title:Fabrication and Characterization of Multiple Glass Microplasm Channels
Author(s):Hwang, In Chan
Contributor(s):Park, Sung-Jin; Eden, J. Gary
Subject(s):plasma devices
microplasma channels
plasma device fabrication
plasma device characterization
Abstract:Recent advances in Micro-Electro-Mechanical Systems (MEMS) have made it possible to confine low temperature nonequilibrium plasmas in micron scale characteristic dimension, and these microplasmas have been heavily studied in the last 10 years due to the distinct characteristics of high power loading of ~ 1 MW/cm3 and atmospheric operation. In addition, the potentials, with several platforms, have been proved in several contexts: on-chip chemical reactors, microplasma-driven laser, millimeter wave controller, portable excitation source, and microdisplay. Microplasmas fabricated in glass can be promising for applications including novel lighting sources, durable on-chip chemical reactors, and millimeter wave controller because glass is optically transparent, chemically inert, and it has high dielectric strength of ~ 10 MV/m. It is, for the realization of those applications, of particular importance to explore the possibility of microplasma channel fabrication in large area and characterize the plasma. Thus, in the paper, multiple microplasma channels are constructed in glass with replica molding and micropowder blasting. Also, electrical and optical characteristics of microplasma channels are investigated.
Issue Date:2008-12
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-24

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