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Title:Microplasma Characteristics of Various Cavity Structures on Glass Substrates
Author(s):Kang, Young Mo
Contributor(s):Sung, Seung Hoon; Eden, James G.; Park, Sung-Jin
Subject(s):plasma devices
microcavity plasma
plasma device fabrication
Abstract:Microcavity plasma devices using glass substrates will be discussed. The cavities formed on glass substrate sustain very high operation voltage over 7 kV p-p and provide long lifetime due to its dielectric characteristics. The fabrication of the micro-scale cavities is achieved by micropowder blasting techniques, which provide high throughput and low cost. Plasma is generated in the microcavities ranging from 100 μm to 1000 μm, and the characteristics of different structures with emphasis on cavity size, dielectric thickness, and electrode spacing will be studied. The data will be used to find a practical structure with lower turn on voltage and brighter light emission.
Issue Date:2008-05
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-01-27

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