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Title:Fabrication of Au Microtube Arrays Using Metal-Assisted Chemical Etching
Author(s):Tsai, Hsing-Keng
Contributor(s):Li, Xiuling
gold nanotubes
microtube arrays
microtube array fabrication
metal-assisted chemical etching
Abstract:Micro/nanoscale metal structures have been widely used in chemical and biological sensing and catalysis, and among these, the chemical properties of Au have been well developed and studied, and determined to be desirable for their stability. The three-dimensional tube structures also increase the surface area and may be used to create sensors with high sensitivity. This research uses a top-down approach with metal-assisted chemical etching (MacEtch) to produce large three-dimensional periodic micron-sized Au tube arrays on a silicon wafer. The goal of this project is to create a fabrication process that optimizes the yield of the Au tube structures.
Issue Date:2010-05
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-02-13

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