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Title:Optimization and Application of Silicon Based MEMs Moisture Sensor
Author(s):Ren, Yukun
Contributor(s):Liu, Gang Logan
Subject(s):MEMS
bioMEMS
nanotechnology
sensor
biology
moisture sensing techniques
Abstract:Compared to traditional resistive moisture sensing technique, nano-pillar based capacitive moisture sensing improves the versatility and sensing accuracy, by taking a more direct approach of measuring capacitance change due to moisture accumulation is preferred. By using a densely distributed nanopillared structure on silicon substrate, moisture from the environment can be trapped between the vacant spaces between nano-pillar structures near the surface of the device substrate. The direct measurement of surface capacitance is possible due to the significant difference between electromagnetic permittivity seen in water and air. To further enhance the performance of silicon only nano-pillar moisture sensor which was previously proposed, this project optimizes the previous design by depositing a layer of SiO2 onto the silicon nano-pillars to insulate the doped silicon thus preventing possible short circuit when conductive ions are present. From preliminary testing results, this effort has resulted in both decreased response time as well as increased precision of the sensor.
Issue Date:2013-05
Genre:Other
Type:Text
Language:English
URI:http://hdl.handle.net/2142/47613
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-03-19


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