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Title:Examination of Argon Ion Sputtering by Auger Electron spectroscopy
Author(s):Gauthier, Thomas F.
Department / Program:Chemical Engineering
Discipline:Chemical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Genre:Thesis
B.S.
Subject(s):Theses -- UIUC
Issue Date:1991
Type:Text
Language:English
Description:Thesis (B.S.) in Chemical Engineering -- University of Illinois at Urbana-Champaign, 1991.
Includes bibliographical references (leaf 13)
URI:http://hdl.handle.net/2142/47895
Rights Information:Copyright 1991 Gauthier, Thomas F.
Date Available in IDEALS:2014-03-20
Date Deposited:1991
Identifier in Online Catalog:3646784
OCLC Identifier:(OCoLC)ocm31066979


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