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Title:Hydrogenated amorphous silicon film growth using an "unbalanced" DC planar magnetron for reactive sputtering
Author(s):Hoekstra, Robert John
Department / Program:Chemistry
Discipline:Chemistry
Degree Granting Institution:University of Illinois at Urbana-Champaign
Genre:Thesis
B.S.
Subject(s):Theses -- UIUC
Issue Date:1992
Type:Text
Language:English
Description:Thesis (B.S.) in Chemistry--University of Illinois at Urbana-Champaign, 1992.
Includes bibliographical references (leaf 10)
URI:http://hdl.handle.net/2142/48242
Rights Information:Copyright 1992 Hoekstra, Robert John.
Date Available in IDEALS:2014-03-20
Date Deposited:1992
Identifier in Online Catalog:3802271
OCLC Identifier:(OCoLC)ocm34220782


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