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Title:A Study on Mechanism of TcEP Process
Author(s):Lee, Dong Joon
Subject(s):thermo capillary enabled purification (TcEP)
TcEP process mechanism
Abstract:In this study, a Carbon Nanotube Field-Effect Transistor (CNTFET) array based metallic nanotube removal process is proposed by using a thermal capillary-enabled purification process. Individual split gate CNTEETs showed the average Ion/Ioff ratio of around 10 to the forth power with on current retention of 35%. The mechanism of the thermal capillary enabled purification (TcEP) process was not fully understood and validated due to some difficulties to get materials parameters of molecular glass. In order to understand the mechanism of the TcEP process, the TcEP process itself needs to be investigated with well-established and known materials to confirm the hypothesis of the mechanism of the TcEP process. It was theoretically proposed that the viscosity of TcEP-resist mainly affects trench formation. In this experiment, the effect of viscosity of trench width was examined using polystyrene with different molecular weights.
Issue Date:2013-12
Publication Status:unpublished
Peer Reviewed:not peer reviewed
Date Available in IDEALS:2014-03-21

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