Browse Graduate Dissertations and Theses at Illinois by Author "Luo, Gang"

  • Luo, Gang (2003)
    Next, an understanding the influence of the transient operating conditions in the prototypical CVD reactor was sought. Film growth rate shows time varying pattern due to the transient operating conditions. But it oscillates ...

    application/pdf

    application/pdfPDF (6MB)Restricted to U of Illinois