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Title:The Electronic and Metallurgical Properties of Amorphous Silicon Thin Films Deposited by Rf Sputtering
Author(s):Mei, Len
Department / Program:Metallurgy and Mining Engineering
Discipline:Metallurgical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Metallurgy
Issue Date:1975
Type:Text
Language:English
Description:151 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1975.
URI:http://hdl.handle.net/2142/68609
Other Identifier(s):(UMI)AAI7606869
Date Available in IDEALS:2014-12-14
Date Deposited:1975


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