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Title:Argon Ion Sputtering of Niobium and Niobium Alloys
Author(s):Tortorelli, Peter Francis
Department / Program:Metallurgy and Mining Engineering
Discipline:Metallurgical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Issue Date:1978
Type:Text
Language:English
Description:189 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1978.
URI:http://hdl.handle.net/2142/68630
Other Identifier(s):(UMI)AAI7821063
Date Available in IDEALS:2014-12-14
Date Deposited:1978


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