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Title:Mechanisms of the Reactive Sputtering of Indium in Argon-Nitrogen and Nitrogen-Oxygen Discharges: Growth of Indium-Nitride, Indium-Oxynitride and Indium-Oxide Films
Author(s):Natarajan, Bangalore Ramaswamiengar
Department / Program:Metallurgy and Mining Engineering
Discipline:Metallurgical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Metallurgy
Issue Date:1979
Type:Text
Language:English
Description:129 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1979.
URI:http://hdl.handle.net/2142/68640
Other Identifier(s):(UMI)AAI8009116
Date Available in IDEALS:2014-12-14
Date Deposited:1979


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