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Title:Silicon microplasma devices as real-time sensors of bulk plasma
Author(s):Choi, Dong San
Advisor(s):Eden, James G.
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):microplasma
silicon microcavity device
photodetection
Abstract:Silicon microcavity devices have been demonstrated to exhibit photodetection capabilities. This thesis explores the possibility of using silicon microcavity devices as passive photodetectors for bulk plasma to serve as a diagnostic tool. The voltage-current characteristics of the device show that there is an interesting phenomenon that needs to be replicated with different types of devices to confirm what is occurring during operation. The discussion provides further insight on possible explanations for the voltage-current characteristics.
Issue Date:2015-01-21
URI:http://hdl.handle.net/2142/72813
Rights Information:Copyright 2014 Dong San Choi
Date Available in IDEALS:2015-01-21
Date Deposited:2014-12


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