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Title:Microassembly via polymeric stamp-based transfer printing
Author(s):Rhee, Sang Il
Advisor(s):Kim, Seok
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):transfer printing
shape memory polymer
polydimethylsiloxane (PDMS) stamp
Abstract:This thesis aims to study microassembly of micro-scale objects involving transfer printing and its applications. Conventional top-down monolithic microfabrication schemes puts many limitations on fabricating structures with complex device architectures or packaging schemes. As such, engineering approaches enabling microassembly of multiple micro-machined components becomes highly desirable to complement conventional microfabrication. Polydimethylsiloxane (PDMS) or shape memory polymer (SMP) as “stamp material,” working in conjunction with 3-dimensional positioning stage, provides reliable and precise relocation method of a micro-scale object for device assembly. Theoretical approaches are studied and experimental assembly processes are performed. Micro-scale structures of various geometries have been assembled in a systematic manner for demonstration. In addition, nano-membrane resonant structure have been demonstrated for functioning device applications.
Issue Date:2015-01-21
Rights Information:Copyright 2014 Sang Il Rhee
Date Available in IDEALS:2015-01-21
Date Deposited:2014-12

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