Microassembly via polymeric stamp-based transfer printing

Abstract

This thesis aims to study microassembly of micro-scale objects involving transfer printing and its applications. Conventional top-down monolithic microfabrication schemes puts many limitations on fabricating structures with complex device architectures or packaging schemes. As such, engineering approaches enabling microassembly of multiple micro-machined components becomes highly desirable to complement conventional microfabrication. Polydimethylsiloxane (PDMS) or shape memory polymer (SMP) as “stamp material,” working in conjunction with 3-dimensional positioning stage, provides reliable and precise relocation method of a micro-scale object for device assembly. Theoretical approaches are studied and experimental assembly processes are performed. Micro-scale structures of various geometries have been assembled in a systematic manner for demonstration. In addition, nano-membrane resonant structure have been demonstrated for functioning device applications.