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Description
Title: | Microassembly via polymeric stamp-based transfer printing |
Author(s): | Rhee, Sang Il |
Advisor(s): | Kim, Seok |
Department / Program: | Mechanical Sci & Engineering |
Discipline: | Mechanical Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | M.S. |
Genre: | Thesis |
Subject(s): | transfer printing
microassembly shape memory polymer polydimethylsiloxane (PDMS) stamp |
Abstract: | This thesis aims to study microassembly of micro-scale objects involving transfer printing and its applications. Conventional top-down monolithic microfabrication schemes puts many limitations on fabricating structures with complex device architectures or packaging schemes. As such, engineering approaches enabling microassembly of multiple micro-machined components becomes highly desirable to complement conventional microfabrication. Polydimethylsiloxane (PDMS) or shape memory polymer (SMP) as “stamp material,” working in conjunction with 3-dimensional positioning stage, provides reliable and precise relocation method of a micro-scale object for device assembly. Theoretical approaches are studied and experimental assembly processes are performed. Micro-scale structures of various geometries have been assembled in a systematic manner for demonstration. In addition, nano-membrane resonant structure have been demonstrated for functioning device applications. |
Issue Date: | 2015-01-21 |
URI: | http://hdl.handle.net/2142/73095 |
Rights Information: | Copyright 2014 Sang Il Rhee |
Date Available in IDEALS: | 2015-01-21 2017-01-22 |
Date Deposited: | 2014-12 |
This item appears in the following Collection(s)
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Dissertations and Theses - Mechanical Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois