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Title:Multitarget Sputtering Using Decoupled Plasma
Author(s):Greene, J.E.; Wickersham, C.E.
Issue Date:1976-04
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. R-726 (UILU-ENG 76-2214)
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory was formerly known as Control Systems Laboratory
URI:http://hdl.handle.net/2142/73954
Sponsor:Contract DAAB-07-72-C-0259
Date Available in IDEALS:2015-04-06


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