Files in this item
| Files | Description | Format |
|---|---|---|
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application/pdf  B20-668.pdf (25MB) | (no description provided) |
Description
| Title: | Glow Discharge Optical Spectroscopy for Microvolume Elemental Analysis for Sputtering Diagnostics |
| Author(s): | Natarajan, Bangalore Ramaswamiengar |
| Issue Date: | 1974-12 |
| Publisher: | Coordinated Science Laboratory, University of Illinois at Urbana-Champaign |
| Series/Report: | Coordinated Science Laboratory Report no. UILU-ENG 74-2234, R-668 |
| Genre: | Report (Grant or Annual) |
| Type: | Text |
| Language: | English |
| Description: | Coordinated Science Laboratory was formerly known as Control Systems Laboratory |
| URI: | http://hdl.handle.net/2142/75094 |
| Sponsor: | Joint Services Electronics Program / DAAB-07-72-C-0259 National Science Foundation / NSF GH-32651 |
| Date Available in IDEALS: | 2015-04-22 2017-07-14 |