| Title: | Glow Discharge Optical Spectroscopy for Microvolume Elemental Analysis for Sputtering Diagnostics |
| Author(s): | Natarajan, Bangalore Ramaswamiengar |
| Issue Date: | 1974-12 |
| Publisher: | Coordinated Science Laboratory |
| Series/Report: | Coordinated Science Laboratory Report no. R-668 |
| Genre: | Report |
| Type: | Text |
| Language: | English |
| Description: | Coordinated Science Laboratory was formerly known as Control Systems Laboratory |
| URI: | http://hdl.handle.net/2142/75094 |
| Sponsor: | DAAB-07-72-C-0259 NSF GH-32651 |
| Date Available in IDEALS: | 2015-04-22 |
B20-668.pdf (24MB)