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Description
Title: | Glow Discharge Optical Spectroscopy for Microvolume Elemental Analysis for Sputtering Diagnostics |
Author(s): | Natarajan, Bangalore Ramaswamiengar |
Issue Date: | 1974-12 |
Publisher: | Coordinated Science Laboratory, University of Illinois at Urbana-Champaign |
Series/Report: | Coordinated Science Laboratory Report no. UILU-ENG 74-2234, R-668 |
Genre: | Report (Grant or Annual) |
Type: | Text |
Language: | English |
Description: | Coordinated Science Laboratory was formerly known as Control Systems Laboratory |
URI: | http://hdl.handle.net/2142/75094 |
Sponsor: | Joint Services Electronics Program / DAAB-07-72-C-0259 National Science Foundation / NSF GH-32651 |
Date Available in IDEALS: | 2015-04-22 2017-07-14 |