Files in this item

FilesDescriptionFormat

application/pdf

application/pdfB21-720.pdf (16MB)Restricted to U of Illinois
(no description provided)PDF

Description

Title:Glow Discharge Optical Spectroscopy for Measurement of Boron Implanted Distributions in Silicon
Author(s):Marcyk, Gerald Twiggs
Issue Date:1976-03
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. R-720 (UILU-ENG 76-2208)
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory was formerly known as Control Systems Laboratory
URI:http://hdl.handle.net/2142/75117
Sponsor:DAAB-07-72-C-0259; NSF DMR-73-02359
Date Available in IDEALS:2015-04-22


This item appears in the following Collection(s)

Item Statistics