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Description
Title: | Studies of High-Dose Ion Implantation in Silicon |
Author(s): | Tsai, Mon Yen |
Subject(s): | High-dose ion implantation in silicon
Recrystallization of implanted amorphous silicon |
Issue Date: | 1978-09 |
Publisher: | Coordinated Science Laboratory, University of Illinois at Urbana-Champaign |
Series/Report: | Coordinated Science Laboratory Report no. UILU-ENG 78-2217, R-824 |
Genre: | Report (Grant or Annual) |
Type: | Text |
Language: | English |
Description: | Coordinated Science Laboratory changed its name from Control Systems Laboratory |
URI: | http://hdl.handle.net/2142/75634 |
Sponsor: | Joint Services Electronics Program / DAAB-07-72-C-0259 National Science Foundation / NSF DMR 77-22228 |
Date Available in IDEALS: | 2015-04-22 2017-07-14 |