Files in this item
| Files | Description | Format |
|---|---|---|
|
application/pdf  78-2228.pdf (4MB) | full text |
Description
| Title: | Atomic and Electrical Profile Studies of Ion-Implanted Semiconductors |
| Author(s): | Marcyk, Gerald Twiggs |
| Subject(s): | Ion implantation
Optical spectroscopy |
| Issue Date: | 1978-12 |
| Publisher: | Coordinated Science Laboratory, University of Illinois at Urbana-Champaign |
| Series/Report: | Coordinated Science Laboratory Report no. UILU-ENG 78-2228, R-835 |
| Genre: | Report (Grant or Annual) |
| Type: | Text |
| Language: | English |
| Description: | Coordinated Science Laboratory changed its name from Control Systems Laboratory |
| URI: | http://hdl.handle.net/2142/75639 |
| Sponsor: | Joint Services Electronics Program / DAAB-07-72-C-0259 and DAAG-29-78-C-0016 National Science Foundation / NSF DMR-77-22228 Office of Naval Research / N00014-76-C-0806 |
| Date Available in IDEALS: | 2015-04-22 2017-07-15 |