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Title:Atomic and Electrical Profile Studies of Ion-Implanted Semiconductors
Author(s):Marcyk, Gerald Twiggs
Subject(s):Ion implantation
Optical spectroscopy
Issue Date:1978-12
Publisher:Coordinated Science Laboratory
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG-78-2228, R-835
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75639
Sponsor:Joint Services Electronics Program / DAAB-07-72-C-0259 and DAAG-29-78-C-0016
National Science Foundation / NSF DMR-77-22228
Office of Naval Research / N00014-76-C-0806
Date Available in IDEALS:2015-04-22


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