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Title:Encapsulation Studies and Planar Device Fabrication in Gallium Arsenide
Author(s):Helix, Max John
Subject(s):Ion implantation
GaAs
Silicon nitride
Issue Date:1979-09
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG 78-2251, R-858
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75649
Sponsor:Joint Services Electronics Program / N00014-79-C-0424
Office of Naval Research / ONR N00014-76-C-0806
Date Available in IDEALS:2015-04-22


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